<Source> Ministry of Trade Industry and Energy, Cleanroom Operation Optimization Guide for Air-conditioning Energy 2014.02
| Type | Control Target | Application |
|---|---|---|
| Industrial Cleanroom | Particles | Semiconductor, aerospace, electronics, precision industry |
| Biological Cleanroom | Bioparticles | Aseptic room and patient room |
| GMP industry of pharmaceuticals and food | ||
| GLP and biohazard measures |
<Source> Ministry of Trade Industry and Energy, Cleanroom Operation Optimization Guide for Air-conditioning Energy 2014.02
| ISO Cleanness Class | Particle Concentration Allowance in excess of Designated Size (ea/㎥) | (Reference) Based on Fed Std | |||||
|---|---|---|---|---|---|---|---|
| 0.1㎛ | 0.2㎛ | 0.3㎛ | 0.5㎛ | 1㎛ | 5㎛ | ||
| 1 | 10 | 2 | - | - | - | - | |
| 2 | 100 | 24 | 10 | 4 | - | - | |
| 3 | 1,000 | 237 | 102 | 35 | 8 | - | 1 |
| 4 | 10,000 | 2,370 | 1,020 | 352 | 83 | - | 10 |
| 5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 29 | 100 |
| 6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 | 1,000 |
| 7 | 352,000 | 83,200 | 2,930 | 10,000 | |||
| 8 | 3,520,000 | 832,000 | 29,300 | 100,000 | |||
| 9 | 35,200,000 | 8,320,000 | 293,000 | 1,000,000 | |||
<Source> Ministry of Trade Industry and Energy, Cleanroom Operation Optimization Guide for Air-conditioning Energy 2014.02
| Type | Cleanness | Dust Particle | Final Filter | Control Target | Maintenance | Cleanness Monitoring |
|---|---|---|---|---|---|---|
| ICR | Class 1~8 | 0.1~0.5㎛ | HEPA ULPA | Dust, Particle, Chemical Pressure (+) Air flow distribution Temperature, Humidity |
Cleaning | Dust concentration Chemical concentration |
| BCR | Class 5~8 | 0.1~10㎛ with 5㎛ as a median | HEPA moderate-performance filter | Microorganism, non-living object, Pressure (+,-) Air flow distribution, Temperature, Humidity |
Washing, Microorganism removal, Sanitization, Sterilization | Dust concentration Number of microorganisms |
<Source> Ministry of Trade Industry and Energy, Cleanroom Operation Optimization Guide for Air-conditioning Energy 2014.02
| Class | Particle Concentration Allowance in excess of Designated Size (ea/㎥) | ||||
|---|---|---|---|---|---|
| 0.1㎥ | 0.2㎥ | 0.3㎥ | 0.4㎥ | 0.5㎥ | |
| 1 | 35 | 7.5 | 3 | 1 | NA |
| 10 | 350 | 75 | 30 | 10 | NA |
| 100 | NA | 750 | 300 | 100 | NA |
| 1,000 | NA | NA | NA | 1,000 | 7 |
| 10,000 | NA | NA | NA | 10,000 | 70 |
| 100,000 | NA | NA | NA | 100,000 | 700 |
